The introduction of new materials and technologies in nanoimprint lithography (NIL) requires a detailed study of their tribological properties. Coatings based on the AlCuFeB system are of interest due to their potential hardness, chemical inertness, and the possibility of controlled change of properties. The aim of this work is to study the tribological characteristics of AlCuFeB coatings obtained by various methods and to evaluate their applicability for solving problems related to wear and adhesion in NIL processes.
In recent years, there has been a significant increase in research interest in complex metal alloys (CMAs). CMAs have a number of attractive properties, including low surface energy and increased wear resistance, making them promising for use as protective coatings. The AlCuFeB compound has attracted particular attention, since the introduction of boron helps reduce friction.
Nanoimprint lithography, like other manufacturing technologies, faces challenges related to sticking and damage of templates and substrates due to friction and adhesion forces at the point of material contact. Using complex metal alloys as coatings may be a solution, as they can reduce surface forces, potentially reducing defects during manufacturing and allowing for more complex designs.
This paper focuses on the study of the properties of AlCuFeB CMC-based coatings, considers methods for their production, analyzes their characteristics, and discusses the possibilities of using this compound in nanoimprint lithography. An atomic force microscope (AFM) was used to perform most of the measurements, which was used as a profilometer, tribometer, and tool for determining adhesion forces.
The experimental part includes the synthesis of AlCuFeB coatings by magnetron sputtering on various substrates. Variation of sputtering parameters (power, pressure, gas mixture composition) allows obtaining coatings with different microstructure and phase composition. The obtained samples are characterized by X-ray diffraction, scanning electron microscopy and atomic force microscopy. Tribological tests are carried out on a tribometer according to the “ball-disk” scheme using various materials of counterbodies.
The results show that the microstructure and phase composition of AlCuFeB coatings have a significant effect on their tribological properties. It was found that coatings with a nanocrystalline structure have higher hardness and wear resistance compared to amorphous coatings. In addition, the introduction of boron into the coating leads to the formation of solid borides, which helps reduce the friction coefficient and increase wear resistance. The results obtained allow us to optimize the composition and structure of AlCuFeB coatings for their use as protective layers in NIL processes, reducing stamp wear and improving the quality of the formed nanostructures.
Author: J. M. Stelmachowski,Z. Rymuza,C. Eisenmenger-Sittner
Institute: Warsaw University of Technology, Institute of Micromechanics and Photonics, ul. S. A. Boboli, 8, PL 02-525 Warsaw, Poland, Vienna University of Technology, Institute of Solid State Physics, 138, Widener Hauptstrasse 8-10, A-1040 Vienna, Austria